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Semiconductor Technology

At a glance

BRANCH:Semiconductor Technology
APPLICATION:Adjuster unit
PRODUCT:LIKselect (linear)
PRINCIPLE:incremental
FEATURE:Enormous space savings in limited installation spaces as well as high precision due to high-resolution measuring signals, even in vacuum applications
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Description

Semiconductor technology is engaged in the technical production of microelectronic components and assemblies, which are primarily made of semiconductor materials. Integrated circuits (ICs), manufactured from a semiconductor material such as silicon, are an important part of the production of modern electronic devices. Semiconductor production is a highly complex process that has to be continuously developed due to increasing demands on the performance of electronics. The demand for corresponding systems, machines and equipment increases from year to year. 

High-precision positioning of axes is the key to many achievements of modern technology. Particularly in industrial semiconductor production or in the fields of medicine, research and inspection of materials, positioning tasks are becoming increasingly important. The challenges here are the constant miniaturization of assemblies, the highly accurate and reproducible measurement of translations, and the reliability of integrated systems.

Due to the very small size and modular design of the LIKselect optical linear measuring system from NUMERIK JENA, it is ideally suited for integration in very small, flat positioning tables.

In this example, two LIKselect measuring systems were integrated into a particularly flat cross table. This can be used for positioning components, wafers or production units. The LIKselect also offers the possibility to operate assemblies like a cross table in vacuum environments. This opens up new possibilities, especially in innovative and complex areas such as semiconductor technology or photonics. 

Our product series at a glance

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LIK series

Its extremely compact design as well as many configuration options make this product series an all-round talent for incremental path measurements

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LIA series

The LIA series offers a wide range of application possibilities and is configurable with expandable features such as optional switching sensors

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LAK series

The outstanding characteristics of this encoder are based on a combination of incremental and absolute measuring technology

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RIK series

The flat and lightweight design of the encoder enables users a wide range of applications for rotary measuring tasks

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